| Customization: | Available |
|---|---|
| After-sales Service: | 1 Year |
| Warranty: | 1 Year |
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| Model | TOB-DSP-1200ºC-PECVDS Turning type vacuum tube furnace |
|
| Power | 3.5KW | |
| Furnace tube size(mm) | Dia 60(OD) X1200mm | |
| Dimension | 1300X420X1200 | |
| Power supply voltage | 220V | |
| Phase number | Single-phase | |
| Temperature control mode | Yudian temperature control 30 sections can only use PID temperature regulation. FP93 temperature control (from Japan) (Replace imported instruments, for an additional fee) 1,40 section program temperature control can be divided into 4,2,1 group program, if the program is divided into four groups, each program segment 10, 2,6 group PID control, low, medium and high temperature can each with a set of PID, such that each segment is capable of controlling the temperature is very accurate. |
|
| Trigger | Phase-shift trigger | |
| SCR | 106 / 16E Germany Simon Kang | |
| Max temperature | 1200 ºC | |
| Rated temperature | 1100 ºC | |
| Heating rate | ≤30 ºC/ Min (Available upon request modification) | |
| Control accuracy | +/- 1 ºC | |
| Recommended heating rate | ≤15 ºC/ Min | |
| Heating length | 400mm | |
| Thermocouple Type | K type | |
| Certification | CE | |
| Surrounding surface temperature | ≤45ºC | |
| Turn the motor power | 40W | |
| Electric putter power | 40W | |
| Furnace can be tilted angle | -10 ~30 degrees | |
| Tube rotation rate | Continuously variable motor speed can be adjustable in 1-25 rev / min | |
| Plasma RF Power | Power output range | 0-500W |
| Maximum reflected power | 10W | |
| Signal frequency | 13.56MHZ ± 0.005% | |
| Noise | <30 dB | |
| Air cooling | cooling method | |
| Input Power | 208-240V 50 / 60HZ | |
| GX supply system main parameters |
Standard range | Proton flow controller 5,10,20,30,50,100,200,300,500SCCM, 1,2,3,5,10SLM (you can choose any scale) |
| Accuracy | ± 1.5% | |
| Pressure drop | <0.01MPa | |
| Repeatability | ± 0.2% F.S | |
| Max Operating pressure |
3MP | |
| VS-0.1 exhaust system | power supply | 220V / 380V 380W |
| Pumping rate | 2L / S | |
| Resistance vacuum gauge | ZDR-I | |
| Vacuum measurement range | 0.1-10 5 Pa | |
| Vacuum pump | VRD-8 | |
| Corrugated pipe | KF25X1000mm | |
| Vacuum system | 10 -1Pa | |
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